Instrumentation Development
- Automated Slots Inspection Vision System
- High-Precision Air Temperature Profile Measurement and Data Logging System
Automated Slots Inspection Vision System
TEAM has designed and built a vision inspection station to perform automated slots counting and analysis on wafers and castles to support Sandia National Lab (SNL) Z-Machine experiments. This system provides a final inspection of wafers/ castles after slot cutting on the EDM Indexer.
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Fig 1 – Precision Rotary Stage with 50mm Wafer Undertest (left).
Fig 2 – Slot Inspection Workstation (right). |
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The system utilizes machine vision and pattern recognition methods to perform automated search, counting, and measurement of long micro slots (less than 25 microns. It incorporates optical microscope, precise rotation control and image acquisition as well as image processing modules to search for specific objects.
High-Precision Air Temperature Profile Measurement
and Data Logging System
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Fig 2 – Partial View of DAQ
and Temperature Sensors. |
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The model TMS-01 is a state-of-the-art high precision air temperature profile measurement and data logging system. It is designed to accurately measure temperature profiles in a clean room environment. An array of 2x4 sensors provides temperature measurement along a column. The temperature can be continuously monitored by a computer via Ethernet connection, stored in a database for future analysis, or stored directly on a CompactFlash memory card for later downloading to a PC.
This system is particularly useful in metrology laboratories or high-precision production environments where air temperature variation has to be monitored and logged.
TMS-01 Specifications:
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| Fig 1 – TMS-01 In QA Lab (left). Fig 3 – Temperature Logging System at CMM in QA Lab (right). | ||